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| Journal of Vacuum Science and Technology B. Microelectronics Processing and Phenomena Published by: New York, NY, American Vacuum Society (United States of America) Subject: Physics Language: English Published: 1983-2005 ISSN: 0734-211X Available at 5 Universities. | |||
| Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films Published by: New York, NY, American Vacuum Society (United States of America) Subject: Physics Language: English Published: 1983- ISSN: 0734-2101, 1520-8559 Available at 9 Universities. | |||